As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]
Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]
The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]
This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]
Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical [...]
, Chen E.
, Flannery A.
, Garate J.
, Kwon H.
, Marx D.
, Nasiri S.
, Novack M.
, Sigari El
, Transparent Networks, US
The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. [...]
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under [...]
We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to [...]
In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the [...]
In the past few years, an information preservation (IP) method [1-6] has emerged as a numerical technique to analyze subsonic, micro-scale gas flows. In this method, simulated molecules move through physical space and undergo collisions [...]
Nanoscale plasticity has drawn significant attention in recent years. Extensive Experimental and numerical studies have been conducted in this field. In previous molecular dynamics (MD) simulations, the Nose-Hoover isothermal procedure was often used to maintain [...]
Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The [...]
In this project we discuss the thermomechanical simulations performed in the aim of optimising the GaAs based Micromechanical Thermal Converter that creates heart of Microwave Transmitted power sensor. Conception of the absorbed power measurement is [...]
The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or [...]
A new design and analysis of a resonant magnetometer is presented. Preliminary analysis shows a sensitivity of 3.9mV/microT. BESOI manufacturing techniques promises easy incorporation to present gyroscope and accelerometer designs promising a complete navigational control [...]
We present the modeling and simulation results in designing a surface micromachined, capacitive triaxial accelerometer. Electrical FEA simulations calculate the nominal values of the sensing capacitors and compared with parallel-plate analytical model. The mechanical static [...]
In recent years we have witnessed the explosive growth of wireless communication services. The future trend of wireless products is towards integration, size and cost reduction. With MEMS technologies, the thin film bulk acoustic wave [...]
Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to [...]
Microphone is one of the most challenging and developing areas and markets in the field of microsensor technology. Piezoelectric microphones have the advantages of simple fabrication process and easy to be integrated into semiconductor devices [...]
We discuss the mechanical design and optimization of piezoresistive microcantilevers for use in detecting changes in surface stress upon analyte-receptor binding. Conventional microcantilevers are used along with an optical detection system in many commercially available [...]
Mechanical damping strongly influences the sensitivity and resolution of nano-sensors and actuators. In this paper, we have investigated one of the key intrinsic mechanisms responsible for dissipation of vibrational energy in beams composed of a [...]
A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external [...]
We have focused our research to new principles of converting energy by means of microstructured components. It is possible to extend the usable water power recourses by converting the kinetic energy directly. This type of [...]
Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition [...]
A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]
This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage [...]
Micromechanical resonators based filters are considered as potential replacements of prevalent tank circuits due to their high selectivity and on chip integration compatibility. Micromachined bandpass filters have been operated both in HF and IF regions [...]
An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (
High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]
The demand for powerful actuators, which can be embedded into MEMS devices draws attention to electrothermal actuators, although there can be drawbacks such as the heat created during actuation. The main advantage is the low [...]
The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an [...]
MicroElectroMechanical (MEM) vibrating structures such as linear drive resonators can be used as driving components in signal processing applications. The choice of these components is assisted by the fact that these MEM devices display high [...]
Vibration energy transmission from MEMS resonator through anchor to substrate, viz., anchor loss, is examined by utilizing the coupled substrate-resonator-electrostatic numerical model. The resonator is electrostatically excited beam-type structure anchored at both ends onto multi-layered [...]
MEMS switches have used in a wide variety of microwave applications because of low loss and small measurable signal distortion since the switching action is accomplished by mechanical contact. While various microswitches are currently being [...]
The paper presents the design, modeling, simulation, and initial characterization of a novel MEMS vibratory rate integrating gyroscope, which uses a dual mass architecture. In contrast to conventional micromachined vibratory gyroscopes which measure angular rate, [...]
A Nanoscopic Rotary Electrostatic Motor [J.H. Wright (Dept. Mathematics and Computer Science), and D.P. Sheehan (Dept. Physics), University of San Diego, San Diego, CA 92110] A novel, rotary, sub-micron, solid-state motor is introduced that uses [...]
This paper reports a novel 4 degrees-of-freedom (DOF) non-resonant micromachined gyroscope design concept that addresses two major MEMS gyroscope design challenges: eliminating the mode-matching requirement, and minimizing instability and drift due to mechanical coupling between [...]
Simulations of cantilever beam micro-switches such as those shown in Figure 1 exhibit two important operational voltages: the pull-in voltage when contact is initiated at the landing electrode, and the collapse voltage when the cantilever [...]
, Fujimori T.
, Fujimoto R.
, Futamoto K.
, Homma T.
, Ichitsubo T.
, Ishisaki Y.
, Iyomoto N.
, Izumi T.
, Kobayashi H.
, Kudo H.
, Kuroda Y.
, Mitsuda K.
, Mori K.
, Morita U.
, Nakamura T.
, Ohashi T.
, Ohtsuka S.
, Onishi M.
, Osaka T.
, Oshima T.
, Otake K.
, Sato H.
, Shoji S.
, Takei Y.
, Yamasaki N.Y.
, Waseda University, JP
We are developing a multi-pixel x-ray microcalorimeters in order to realize good energy resolution x-ray imaging for future Japanese X-ray astronomy missions. The energy resolutions of 10eV at 6keV and 32x32 pixels of arrayed x-ray [...]
This paper extends spring model approach to include multiple output formulation at arbitrary angles for a given actuation at input port. Parallel assembly for Microsystems could benefit from devices optimized with this formulation. A new [...]
In this paper, we will present a vertical MOSFET formed in the convex corner of silicon microchannels which might be useful for detecting charged biomolecules. The cross type microchannels have four MOSFETs and four pairs [...]
The paper describes methodology of design of cantilever with implanted layers in Si monocrystal. In the paper there is characterized physical model of implanted strain gauges, various girder topologies are designed and basic technological steps [...]
Micromechanical (or umechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are [...]
Though just two years ago nanoparticles and nanotechnology were little more than a blip on the industrial applications radar, over 1 billion in annual venture capital is expected to be invested in the field in [...]
Nano scale structures: Much excitement has been generated in recent years by nano-science breakthroughs. A common characteristic of such developments has been the discovery of novel properties of materials of common composition but with characteristic [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications