Whalen S., Richards C., Richards R., Bahr D., Richards C., Richards R.
Washington State University, US
Keywords: MEMS power, micro heat engine, piezoelectric power
The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods, and is unlike any conventionally manufactured macro-scale engine.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 404 - 407
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-0-9