Rhee S.W. – TechConnect Briefs

Characterization of Nanaoporous Low-Dielectric Constant SiCOH Films using Organosilane Precursor

Heo K., Jin K.S., Jin S., Park S.-G., Ree M., Rhee S.W., Yoon J., Pohang University of Science and Technology, KR

The grazing incidence small-angle X-ray scattering (GISAXS) and X-ray reflectivity (XR) analysis were performed to investigate the nanoporous structure of low dielectric constant carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical [...]

High Resolution Silicon Accelerometer Using Eutectic Bonding

Kim Y.H., Kwang Y., Oh S.H., Rhee S.W., Yeon J.C., Seoul National University, KR

High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]