The Design of a Biaxial Micro Mirror

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Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 328 - 331
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-0-9