Lim G. – TechConnect Briefs

Fabrication and Characterization of MOS Transistor Tip Integrated Micro Cantilever

Lee S-H., Lim G., Moon W., Pohang University of Science and Technology, KR

In this paper, we fabricate and characterize the metal-oxide-semiconductor (MOS) transistor tip integrated micro cantilever, which is proposed for a future high-density data storage system. The integrated MOS transistor tip as the sensing part has [...]

Intelligent Digital 3-Axis IMU for Automotive and Robotic Applications

Cho D-I, Choi B-D, Ko H., Lee A., Lee S-C, Lee S., Lim G., Lww S.C., Park S., Park Y., Song T., Yoo K., Seoul National University, KR

This paper presents the intelligent digital 3-axis IMU (inertial measurement unit) system. The MEMS accelerometer and gyroscope sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing cores accomplish the [...]

A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Micro-Balancing Technique with Self-Excitation

Lee Y., Lim G., Moon W., Pohang University of Science and Technology, KR

A new bio-sensor was developed in order to use in a LOC(Lab-On-a-Chip). The sensor detects the change in the resonance frequency of a micro cantilever with a piezoelectric film(PZT). This is the so-called mass micro-balancing [...]

A Vertical MOSFET for Charge Sensing in the Convex Corner of Si Microchannels

Choi P., Kim D.S., Lee M., Lim G., Lyu H-K, Park C-S, Shin J-K, Kyungpook National University, KP

In this paper, we will present a vertical MOSFET formed in the convex corner of silicon microchannels which might be useful for detecting charged biomolecules. The cross type microchannels have four MOSFETs and four pairs [...]