In 1994 the author patented an intelligent vibration sensor. The device was essentially an accelerometer with integrated analog and digital processing capability as shown in figure 1, which allowed a large proportion of the diagnostic [...]
, Balseanu, M.
, Duster, J.S.
, Hailu, E.
, Kornegay, K.T.
, Li, C.
, Cornell University, US
We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]
The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real [...]
As man-made dynamical systems become increasingly complex, there is an ever-present need to ensure their safe and reliable operation . These requirements extend beyond the normally accepted safety-critical systems (e.g. nuclear reactors, chemical plants, and [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio