Papers – Page 28 – TechConnect Briefs

Optimization of a Micro Actuator Plate Using an Evolutionary Algorithm and Simulation Based on Discrete Element Methods

Quinte A., Jakob W., Scherer K.P., Eggert H., Forschungszentrum Karlsruhe, DE

Within the framework of the OMID joint project (1999 - 2002) funded by the BMBF, a universal, fluidically driven actuator plate is being developed in cooperation with the project partners of Bartels Mikrotechnik GmbH and [...]

Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries

Yen P-C, Yang Y-J, National Taiwan University, TW

A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented. A three-dimensional finite-difference-method (FDM) Stokes flow solver was developed and verified. The system matrices generate by the solver were [...]

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US

This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

Dispersion Modeling in Microfluidic Channels for System-level Optimization

Baidya B., Mukherjee T., Hoburg J.F., Carnegie Mellon University, US

Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced [...]

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries

Yang Y-J, Yu C-J, National Taiwan University, TW

In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be [...]

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Tas N.R., Lammerink T.S.J., Berenschot J.W., Elwenspoek M.C., van den Berg A., University of TWente, NL

This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic [...]

Simulation of a Micro Dispenser Using Lumped Models

Koltay P., Moosmann C., Litterst C., Streule W., Zengerle R., University of Freiburg, DE

In this paper the modelling of a micro dispenser by system simulations according to fluidic network theory is reported. The dispensing device under consideration (the so called “Nano-Jet” dispenser) is described in detail in [1]. [...]

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Tinttunen T., Veijola T., Nieminen H., Ermolov V., Ryhanen T., Helsinki University of Technology, FI

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]

Coupled-Energy-Domain Macromodeling of MEMS Devices

Casinovi G., Georgia Institute of Technology, US

This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All [...]