Papers – Page 27 – TechConnect Briefs

Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor

Innocent M., Wambacq P., Donnay S., Tilmans H., Engels M., DeMan H., Sansen W., IMEC, BE

Today’s wireless communication systems often require a high linearity for the RF building blocks. One of these blocks can be a tunable LC filter using MEMS variable capacitors (varicaps). In these filters, the varicaps are [...]

Snap-Through Bilayer Microbeam

Cabal A., Ross D.S., Eastman Kodak Company, US

In this paper, we describe our theoretical investigations of snap-through bilayer microbeams. We use a mathematical model that we devised to investigate the nonmonotone dependence of the vibrational frequency of such beams on temperature. The [...]

Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors

Wang W.J., Lin R.M., Nanyang Technological, SG

In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber [...]

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS

Jorgensen C., Melander D., Schmidt R., Plimpton S., Sandia National Laboratories, US

This paper describes a successful approach to improving the robustness and speed of Sandia National Laboratory’s 3-D MEMS geometry modeler through a combination of mask subdivision and code parallelization. Symptoms of the robustness problems experienced [...]

Optimal Design of a MEMS Relay Switch

Brenner M.P., Lang J., Li J., Qiu J., Slocum A., Harvard University, US

We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a [...]

Thermal and Load-Deflection FE Analyses of Parylene Diaphragms

Sim W., Kim B., Choi B., Park J-O, Intelligent Microsystem Center, KR

In this study, the finite-element method(FEM) is employed in order to analyze the mechanical behavior of parylene diaphragm. Thermal and load-deflection FE analyses of flat and corrugated parylene diaphragm are performed to find an effect [...]

An Efficient Numerical Algorithm for Extracting Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes

Elata D., Bochobza-Degani O., Nemirovsky Y., Technion – Israel Institute of Technology, IL

In this work the stability of electrostatic actuators with multiple uncoupled voltage sources applied to separate isolated excitation electrodes is analyzed. These electrodes are used to drive a continuous deformable element. A novel computational strategy [...]

Actuation for Probe-Based Mass Data Storage

Alfaro J.F., Fedder G.K., Carnegie Mellon University, US

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response [...]

Capillary Forces in Micro-Fluidic Self-Assembly

Greiner A., Lienemann J., Korvink J.G., Xiong X., Hanein Y., Böhringer K.F., IMTEK, Albert Ludwig University, DE

Parallel self-assembly in the fluidic phase is a promising alternative technique to conventional pick-and-place assembly. In this work the hydrophobic-hydrophilic material system between binding sites for microparts is simulated with respect to alignment precision. The [...]