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Home2002April

Month: April 2002

TechConnect Proceedings Papers

Noise Considerations for Closed Loop Digital Accelerometers

Gaura E., Kraft M., Coventry University, UK
This paper investigates the noise shaping properties of a sigma-delta modulator type control system applied to a micromachined accelerometer. Three noise sources are present in such an electromechanical closed loop system: mechanical noise due to [...]

Nonlinear Analytical Reduced-Order Models for MEMS

Westby E.R., Fjeldly T.A., Norwegian University of Science and Technology, NO
We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting [...]

Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language

Tételin A., Lévi H., Mongellaz B., Pellet C., Laboratoire IXL, FR
Measuring relative humidity in breath is useful for diagnosing pulmonary diseases. Humidity capacitive sensors were developed to equip a portable clinical device. Simulation is needed to design an electronic interface circuit to be integrated on [...]

Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC

Zhang T., Chakrabarty K., Fair R.B., Cadence Design Systems, Inc., US
This paper describes the role of SystemC in developing an integrated modeling and simulatio environment for microelectrofluidic systems (MEFS). Based on the unique modeling and simulation needs for MEFS, we examine suitability of several existing [...]

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US
MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Integrated Modeling of Optical MEMS Subsystems

Stoll R., Plowman T., Winick D., Morris A., Coventor, US
This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, [...]

Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis

Rewienski M., White J.K., Massachusetts Institute of Technology, US
In this paper we present an improved algorithm for nonlinear model order reduction (MOR) based on the trajectory piecewise-linear method proposed in [6] which, as shown before, provides an e ective and eÆcient strategy for [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE
We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Yaglioglu O., Su Y.H., Roberts D.C., Carretero J., Hagood N.W., Massachusetts Institute of Technology, US
This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for [...]

Numerical Simulation of Droplet Shapes on Rough Surfaces

Patankar N.A., Chen Y., Northwestern University, US
It has been demonstrated that surface roughness causes superhydrophobicity. Our objective is to develop a numerical tool and study the relationship between the roughness characteristics and the apparent contact angle and motion of liquid drops [...]

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