Papers – Page 1010 – TechConnect Briefs

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Veijola T., Helsinki University of Technology, FI

Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the [...]

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme

Schrag G., Voigt P., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also [...]

Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US

Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]

Boundary Independent Exact Thermal Model for Electronic Systems

Gerstenmaier Y.C., Pape H., Wachutka G., Siemens AG, Corporate Technology, DE

A compact thermal model is presented, which describes the hot spot (junction) temperatures and contact heat flows of electronic packages or systems in the stationary state. The model is exact provided that the underlying heat [...]

A Design Approach for Robustness Improvement of Rate Gyroscopes

Acar C., Shkel A., University of California Irvine, US

This paper reports a design concept for robustness improvement of micromachined gyroscopes. The novelty of the approach is in expanding the design space of the device by increasing the degrees-of-freedom (DOF) of the system. The [...]

Compact Model for the Squeezed-Film Damping Including the Open Border Effects

Veijola T., Ruokonen K., Tittonen I., Helsinki University of Technology, FI

A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas [...]

Scalable Macromodels for Microelectromechanical Systems

Srinivasan V., Jog A., Fair R.B., Duke University, US

A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under [...]

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