Table-Based Numerical Macromodeling for MEMS Devices


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In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical data. Cubic spline interpolation is used to evaluate model functions during simulation. Numerical linear models are also constructed for DC analysis, AC analysis and feedback system design. This method is demonstrated by modeling and simulating a MEMS accelerometer.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 68 - 71
Industry sector: Sensors, MEMS, Electronics
Topic: Compact Modeling
ISBN: 0-9708275-0-4