Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 96 - 99
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems