Papers – Page 1009 – TechConnect Briefs

Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS

Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K., University of Pennsylvania, 220 S. 33rd Street, US

A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from [...]

Designing Efficient Computer Experiments for Metamodel Generation

Crary S.B., Woodcock D.M., Hieke A., Crary Group, US

We demonstrate the relative merits of IZ-optimal designs for computer experiments relative to Latin hypercube designs, using two examples, both in two factors and eleven points, one a simple function from Welch et al. [1] [...]

Robust Mask-Layout Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

A method for automated mask-layout and process synthesis for MEMS using Genetic Algorithms was proposed by Ma and Antonsson [5]. For a given desired device shape, and several fabrication process choices, this synthesis method will [...]

A New Material Interpolation Scheme for the Topology Optimization of Thermally Actuated Compliant Micromechanisms

Yin L., Ananthasuresh G.K., University of Pennsylvania, US

Thermally actuated compliant micromechanisms are selectively heated elastic continua that take advantage of nonuniform thermal expansion and mechanical leveraging to amplify displacements and forces. These can be designed systematically, as shown in the earlier work [...]

Optimization of Integrated Magnetic Field Sensors

Lienemann J., Greiner A., Korvink J.G., Sigmund O., Albert Ludwig University, DE

We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given [...]

The Coupled-Domain System Simulation/Simulatability Problem

Jopling J., Rose D., Fair R.B., Duke University, US

This paper discusses the diculties in current approaches to modeling and simulation of coupled-domain systems and presents new approaches and solutions to simulation execution and the model-simulation gap. The ongoing paradigm shift toward coupled-domain systems [...]

Efficient Simulation of MEMS Using Element Stamps

Casinovi G., Georgia Institute of Technology, US

This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US

CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators

Kraft M., Redman-White W., Mokhtari M.E., University of Southampton, UK

Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order [...]

Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer

Gaura E., Kraft M., Coventry University, UK

This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta [...]