A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas at the borders. The previously published electrical-equivalent macro model is modified to account for the end effects. The model is usable in simulating the circuit level and the system level behavior of gas-damped devices in the time- and frequency domains.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 76 - 79
Industry sector: Sensors, MEMS, Electronics
Topic: Compact Modeling