A Hybrid Process Design Kit: Towards Integrating CMOS and III-V Devices
Chiah S.B., Zhou X., Lee K.E.K., Ng C.Y., Antoniadis D., Fitzgerald E.A., Nanyang Technological University, SG
A hybrid process design kit (PDK) for novel integrated circuits incorporating high performance compound semiconductor materials and devices into existing production Si-CMOS compatible foundry process is presented. The hybrid PDK permits direct integration of Au-free [...]