Experimental mechanical stress characterization of MEMS by using of confocal laser scanning microscope with a Raman spectroscopy interface

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In this study, we demonstrate mechanical stress and shape profile measurements using confocal laser scanning microscopy (CLM) interface for Raman spectroscopy and that this system is reasonable and helpful to the MEMS designer. By combining [...]

Testing the validity of small angle and adsorption-based characterization techniques by atomic-scale simulation

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This work aims at testing small angle scattering and adsorption/desorption-based characterization techniques routinely used for nanoporous material characterization (specific surface and pore size distribution measurements). For that purpose, we report Grand Canonical Monte Carlo results [...]

Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-6-5