Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale

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A new time-of-flight mass spectometer of postionized secondary neutrals, SARISA, has been developed and constructed at Argonne National Laboratory. This advanced analytical instrument has uniquely high useful yield >20%, is equipped with high spatial resolution microprobes (ion, electron and laser) that are combined with low energy ion sputtering for high depth resolution. This makes the instrument capable of three-dimensional characterization of samples with nanometer dimensions.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Pages: 733 - 736
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-6-5