Experimental mechanical stress characterization of MEMS by using of confocal laser scanning microscope with a Raman spectroscopy interface
Yamaguchi M., Ueno S., Miura I., Erikawa W., Technical Research Institute Japan Society for the promotion of machine industry, JP
In this study, we demonstrate mechanical stress and shape profile measurements using confocal laser scanning microscopy (CLM) interface for Raman spectroscopy and that this system is reasonable and helpful to the MEMS designer. By combining [...]