Papers:
Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS
This paper describes a successful approach to improving the robustness and speed of Sandia National Laboratory’s 3-D MEMS geometry modeler through a combination of mask subdivision and code parallelization. Symptoms of the robustness problems experienced [...]
Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive
Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]
Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors
In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber [...]
Snap-Through Bilayer Microbeam
In this paper, we describe our theoretical investigations of snap-through bilayer microbeams. We use a mathematical model that we devised to investigate the nonmonotone dependence of the vibrational frequency of such beams on temperature. The [...]
Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor
Today’s wireless communication systems often require a high linearity for the RF building blocks. One of these blocks can be a tunable LC filter using MEMS variable capacitors (varicaps). In these filters, the varicaps are [...]
Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms
Novel single-chip fabricated condenser structures with corrugated diaphragms for residual stress releasing have been proposed and simulated. An electrostatic-structural coupling FEM analysis has been performed to fully reveal the nonlinear relationship of output electrical signal [...]
Flow Cell Detection with an Optical Fiber
In this experiment, we tested various optical fibers to select a suitable fiber for a effective flow cell detection. In order to align between micronozzle and optical fibers, a guide channel was fabricated by Si [...]
Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches
Simulations of the effects of dielectric charging on the operation of electrostatically actuated capacitive microwave switches have been performed. The simulations are unique in that they incorporate fixed charges into the calculation of the beam [...]
Prediction Model of Microlens Fabricated by Modified LIGA Process
Kim D.S., Lee S-K, Lee S.S., Yang S.S., Kwon T.H., Lee S-K, Lee S.S., Pohang University of Science and Technology, KR
In this paper, we present a prediction model for microlens formation by means of a deep X-ray lithography followed by a thermal treatment of a PMMA (Polymethyl-methacrylate) sheet. According to this modeling, X-ray irradiation causes [...]
Simulation of Electrical Field Induced Particle Transfer
The controlled transfer of charged, densely distributed polymer particles across narrow air gaps is one of the basic mechanisms in modern printing technology. To understand the detachment and transport of charged particles by an electric [...]
Modeling and Simulation of Silicon Microsystem of Chemical Signals
The purpose of this paper is to introduce the new approach to the integrated microsystem oriented for water monitoring. Nowadays it becomes extremely important to analyze and estimate the chemical composition of water. Presented microsystem [...]
Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs
Ochoa E.M., Starman_Jr. L.A., Cowan W.D., Nelson_Jr. T.R., Blum Spahn O., Lott J.A., Air Force Institute of Technology, US
We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with [...]
Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer
Quantum effects have been reported to play an important role in the operation of narrow width SOI devices, in which the carriers experience a two dimensional confinement in a square quantum well at the semiconductor-oxide [...]
Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current
In this work, we start by giving a weak formulation of an ampli er of current to current network model and some estimations for the electrical current using graph theory. These estimations are interpreted in [...]
Simulation Based Design of O2 MEMS Sensor
The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and [...]
Nonlinear Micromachined Flexure for Stiction Reduction
This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are [...]
Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators
A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]
Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications
Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US
Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]
Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space
In the paper, concept of intelligent microsystem structure is presented. This concept is applicable in general surrounding environment. Concrete model of an intelligent temperature microsystem for control purposes is designed. Microsystem function has been verified [...]
Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators
In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with [...]
Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism
The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micromechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body [...]
Simulation and Modeling of a Micro Pressure Sensor Array
In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor [...]
RF Measurement Techniques for Micro-Cantilever Characterization and Application
The reflection coefficient (S11) of a one-port device is most sensitive to its input impedance if a matched condition is obtained. This implies two methods to measure the deflection-induced impedance change for a 1-port device [...]
Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy
Starman_Jr. L.A., Ochoa E.M., Lott J.A., Amer M.S., Cowan W.D., Busbee J.D., Air Force Institute of Technology, US
We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]
Magnetohydrodynamic Micromixing
Modeling of magnetohydrodynamic (MHD) pumping in an annular microchannel is reduced to a two-dimensional Poisson equation for the azimuthal velocity. A method for enhancing the mixing of fluids is proposed, and is proven to yield [...]
A Study of the Behaviour of Magnetic Microactuators
The behavior of an idealized magnetic microactuator is modeled and analyzed. A two parameter mass-spring model is shown to exhibit a bifurcation from one to three steady states as the geometry of the device is [...]
Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers
This paper makes progress on the prediction of mechanical modulus and mechanical relaxation time of macromolecular materials at small length and time scales. Fundamental studies of large molecules in confined geometries inform predictions of macroscopic [...]
Capillary Interaction Between a Small Thin Solid Plate and a Liquid
Micromechanical systems are increasingly being used in micro fluidic and biological applications where solid-liquid interaction phenomena become important. Here, we present an analytical/computational study on the interaction force between a thin solid plate interfacing with [...]
Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon
The effects of rate-enhancing dopants and externally applied stress on interfacial growth during silicon crystallization are modeled using advanced numerical methods. The boron doped crystalline Si is modeled as an isotropic linear elastic solid, and [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-7-1