Ochoa E.M. – TechConnect Briefs

Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy

Starman_Jr. L.A., Ochoa E.M., Lott J.A., Amer M.S., Cowan W.D., Busbee J.D., Air Force Institute of Technology, US

We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Ochoa E.M., Starman_Jr. L.A., Cowan W.D., Nelson_Jr. T.R., Blum Spahn O., Lott J.A., Air Force Institute of Technology, US

We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with [...]