Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors


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In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber array to an output array. Each mirror is actuated by two electrostatic comb drive actuators, and can be rotated bi-directionally and perpendicularly to the chip surface. Finite element method and Gaussian beam propagation model are used to simulate and validate the proposed optical cross-connect switch architecture. The switch concept has been demonstrated using 1550 nm single-mode optical fibers at the switch ports. Results have shown that the switch is much less constrained by the scaling distance of light propagation as the port count grows compared to previously reported switch architectures.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 226 - 229
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-7-1