In this paper, we describe our theoretical investigations of snap-through bilayer microbeams. We use a mathematical model that we devised to investigate the nonmonotone dependence of the vibrational frequency of such beams on temperature. The reader can find information about the fabrication and experiments we used to validate this model in . We describe the fundamental physical difference between buckling and snap-through of a microbeam. We investigate parameters that are critical in the design of snap-through bilayer microbeam for practical purposes. We conclude that the thermal snap-through bilayer microbeam is a better candidate in many applications than a thermally induced buckling microbeam of similar design.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 230 - 233
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications