Equivalent Circuits, Behavioral and Multilevel Simulation

Compact Large-Displacement Model for Capacitive Accelerometer

Veijola T., Kuisma H., Lahdenperä J., Helsinki University of Technology, FI

A compact large-displacement model for a gas damped capacitive accelerometer is presented. The gas-film model has been derived from the modified nonlinear Reynolds equation, where the in uence of the gas rarefaction is included. The [...]

Partial-Element Equivalent-Circuit Model Simulation for Designing RF-Wireless Communication Products with Embedded Passive Components

Smith W.R., National Semiconductor Corporation, US

Rapidly increasing functionality and performance of RF/wireless communication products, along with mandated decreases in size, weight, and cost, have created a critical need to replace discrete, surface-mounted passive circuit components with embedded passives in substrate [...]

Visual Modeling and Design of Microelectromechanical System (MEMS) Transducers

Dewey A., Icoz E., Duke Univeristy, US

Microelectromechanical Systems (MEMS) integrates miniaturized mechanical structures with electronics to extend the benefits of planar integrated circuit technology to a broader class of systems. To realize the potential and growth of MEMS, new modeling, analysis, [...]

Coupled Package-Device Modeling for MEMS

Bart S.F., Zhang S., Rabinovich V.L., Cunningham S., Microcosm Technologies, Inc., US

Microelectromechanical Systems (MEMS), by their nature as sensors and actuators, require application specific packaging. The package is the near environment of the MEMS device and hence has a direct effect on its thermal behavior, on [...]

Optimized Behavioral Model of a Pressure Sensor Including the Touch-Down Effect

Peters D., Bechtold St., Laur R., University of Bremen, DE

The complexity of microsystems is steadily increasing due to the scaling of microelectronic as well as for example mechanical, optical or fluidic devices. In order to be able to get good designs fast, one has [...]

High-Fidelity and Behavioral Simulation of Air Damping in MEMS

Turowski M., Chen Z., Prezekwas A., CFD Research Corporation, US

The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipation, using different level models: 3D numerical solution of Navier-Stokes equations (using CFD-ACE from CFDRC), and circuit/behavioral model (in SPICE and Saber/MAST [...]

A Neural Network Approach for the Identification of Micromachined Accelerometers

Gaura E.I., Steele N., Rider R.J., Coventry University, UK

The paper presents the identification procedure for a nonlinear accelerometer using a neural network. Simulation results obtained in SPICE and Matlab show good agreement between the behaviour of the sensor over its entire working range [...]

Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit

Oms-Elisabelar F., Bergaud C., Nicu L., Martinez A., CNRS, FR

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The [...]

Circuit Simulation of Quantum Well Bistable Laser Diodes

Madhan M.G., Vaya P.R., Gunasekaran N., Anna University, IN

A large signal electrical equivalent circuit for the multi quantum well bistable laser diode has been developed from the rate equations. The dc and transient analysis are carried out using PSPICE circuit simulator. It is [...]

Relaxation-based Circuit Simulation for Large-scale Circuits with Lossy Transmission Lines

Chen C-J., Chinese Culture University, TW

This paper integrates a time-domain transmission line calculation method and relaxation-based circuit dimulation algoright, and investigates the transient response simulation of large-scale circuits with transmission lines. Experimental results have been provided to justify the performance [...]

A Model of Photoelectric Phenomena in MOS Structures at Low Electric Fields

Przewlocki H.M., Institute of Electron Technology, PL

This paper presents a new model of photoelectric phenomena taking place in MOS structures at low electric fields in the dielectric. Solutions of models equations are analyzed and discussed. Using these equations various photoelectric characteristics [...]

Analytical Modeling of Beam Behavior Under Different Actuations

Sarraute E., Dufour I., URA CNRS 1375, FR

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the [...]

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Gyimesi M., Ostergaard D., ANSYS, Inc., US

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices

Nguyen L., Lee H.J., Maher M.A., von Sosen H., Tanner Research, Inc., US

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices Categories: Co-simulation and Optimization System, Multi-level Modeling Linh Nguyen, Hee Jung Lee, Mary Ann Maher, and Harald von Sosen Tanner Research, Inc. VLSI [...]

Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

Rembe C., Hofer E.P., Tibken B., University of Ulm, DE

Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on [...]

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Lu M.S., Fedder G.K., Carnegie Mellon University, US

VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication [...]

A Compact Model for an IC Lateral Diffused MOSFET Using the Lumped-Charge Methodology

Subramanian Y., Lauritzen P.O., Green K.R., Texas Instruments, US

A compact model for an IC Lateral Diffused MOSFET is developed using the Lumped-Charge Methodology[1]. Model equations and key performance characteristics are documented. They satisfy the requirements of Power MOSFET models[2], unlike the competitive macromodels [...]

Compact Modeling of Bistable Electrostatic Actuators

Xu J., Darling R.B., Lauritzen P.O., University of Washington, US

A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a [...]

Papers: