Compact Modeling of Bistable Electrostatic Actuators

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A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a cantilever, including hysteresis and bistability, making it suitable for large-signal circuit analyses. The model is extremely compact by means of using only a single internal system variable and requires only a small number of material and geometrical parameters. The model also properly conserves charge while still representing a voltage-variable, bistable capacitance.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 289 - 292
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6