Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM
Affour B, Bernstein D., Crary S.B., Gianchandani Y.B., Lee H.J., Maher M.A., Woodcock D.M., MEMSCAP S.A., FR
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]