Sensors, MEMS, Electronics – Page 384

Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process

Guth H., Hellmann A., Sieber I., Eggert H., Mohr J., Nakajima H., Tanimot K., Usami T., Forschungszentrum Karlsruhe GmbH, DE

The aim of the presented work is to simulate and validate an ultra miniaturized optical distance sensor, which works by means of triangulation. The sensor is dedicated for a detection range of 1 to 6mm [...]

Applications: Electromagnetics, Optics, Imaging

Finite Element Modeling of a Microhotplate for Microfluidic Applications

Manginell R.P., Rosato D.A., Benson D.A., Frye-Mason G.C., Sandia National Laboratory, US

A hand-held chemical laboratory (mChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively [...]

Modeling of the Piezoelectric Micropump for Imporving the Working Parameters

Nedelcu O.T., Moagar-Poladian V., IMT-Bucharest, RO

In this paper a modeling for the flow of viscous liquids and a way to improve the piezoelectric micropump efficiency are described, in order to find the most convenient set of hydraulic parameters. The main [...]

Nanosecond Range Heating and Temperature Measurement on Thin Layers Experiment and Simulation

Moritz W., Roth U., Heyde M., Rademann K., Reichling M., Hartmann J., Humboldt Universitat zu Berlin, DE

A chemical semiconductor sensor for oxygen gas was activated by thermal treatment. The thin Pt layer of the n-Si/SiO2/Si3N4/LaF3/Pt field effect structure was used as the gate electrode for sensitivity measurements, heating resistance and temperature [...]

Development of CAD Model for MEMS Micropumps

Arik M., Zurn S.M., Bar-Cohen A., Nam Y., Markus D., Polla D., Univeristy of Minnesota, US

This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported [...]

Applications: Micropumps, Heaters, Coolers

3-D Finite Element Modeling Schemes for Design and Simulation of VR Microactuator

Mohamed A., El-Hagry M., Electronics Research Institute, EG

This paper describes a 3-D finite element modeling scheme for the designing and analysis of a powerful variable ñ reluctance (VR) microactuator. The device to be modeled having the basic principles of operation of reluctance [...]

Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range

DeAnna R.G., Roy S., Zorman C.A., Mehregany M., US Army Research Laboratory, US

Finite-element analysis (FEA) modal results of 3C-SiC lateral resonant devices anchored to a Si substrate are presented as resonant frequency versus temperature. The suspended elements are etched from a 2 mm, 3C-SiC film grown at [...]

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

Eaton W.P., Bitsie F., Smith J.H., Plummer D.W., Sandia National Laboratory, US

An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and [...]