Sensors, MEMS, Electronics – Page 239

Elastomeric Composites to Reduce the Effects of Trunnion Mode in Inertial Devices

Perez Ma., Shkel A.M., University of California Irvine, US

Composites have long been known for their ability to combine the properties of dissimilar materials to create properties ideally tailored for an application. We propose applying these features to MEMS in order to reduce the [...]

Electromechanical Modeling of MEMS Resonators with MOSFET Detection

Abelé N., Pott V., Boucart K., Casset F., Séguéni K., Ancey P., Ionescu A.M., Swiss Federal Institute of Technology of Lausanne, CH

This work reports on analytical modeling and investigation of Resonant Suspended-Gate MOSFETs (RSG-MOSFET) as future solutions for RF applications including MEMS and ICs. Pure metal-metal capacitive detection for resonators is shown to be the most [...]

A Robust Approach for Estimating Diffusion Constants from Concentration Data in Microchannel Mixers

Coelho C.P., Desai S., Freeman D., White J.K., Massachusetts Institute of Technology, US

In this paper we present a robust and geometry independent method for the estimation of diffusion coeffients of solutes from image data. Our diffusion coefficient estimation algorithm works in two steps. First, given the device [...]

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

Marzencki M., Basrour S., Charlot B., TIMA, FR

This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a [...]

T-CAD Environment for Multi-Material-MEMS Design

Triltsch U., Büttgenbach S., Straube D., Franke H-J, Technical University of Braunschweig, DE

The presented approach delivers a design tool for multi-material MEMS and can act as a system level tool with interfaces for component level analysis tools. The platform provides interfaces to different knowledge bases which either [...]

A Coarse-Grained Tight Binding Method for Electrostatic Analysis of Nanoelectromechanical Systems (NEMS)

Xu Y., Li G., Aluru N.R., Beckman Institute for Advanced Science and Technology, US

Silicon electrostatic nanoelectromechanical systems (NEMS) are one of the emerging applications in nanotechnology. As the critical length of a NEM structure shrinks to less than a few nanometers, classical models based on continuum approximations become [...]

Performance Tradeoffs in MEMS Sensors with High-Finesse Fabry-Perot Interferometry Detection

Eklund E.J., Shkel A.M., University of California Irvine, US

A detailed analysis with experimental verification is presented for optical MEMS sensors based on Fabry-Perot interferometers (FPI). These sensors consist of two partially transparent parallel plates with reflective inner surfaces, forming a cavity with an [...]

MEMS Modeling and Design

Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles

Hsu C-P, Shih C-T, Wen S-Y, Chien Y-H, Hu C-C, Lee H.W., Industrial Technology Research Institute, TW

Two new types of electrostatic grating light modulators (GLMs) are proposed, designed, and analyzed here for improvement on optical wavefront distortion. The proposed GLMs consist different microbeam structures with spring-like legs to improve the flatness [...]

A Study on Alleviating Deformation of MEMS Structure and Prediction of Residual Stress in Surface Micromachining

Kweon S., Hong S., Shin H., Jeon B., Samsung Advanced Institute of Technology, KR

When MEMS Structure, like RF switch, manufactured in high temperature is cooled down to the room temperature, the difference of the thermal expansion coefficients of structural materials, which are aluminum layer for electrical function and [...]