Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

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This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 545 - 548
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-2-2