MEMS – Page 18 – TechConnect Briefs

A MEMS Vertical Fringe Comb Capacitive Pressure Sensor for Biomedical Application

Shah K., Thumu H., Vibhute V., Singh J., Le H.P., Center of Telecommunication and Microelectronics, AU

This paper presents the design and implementation of a Micro Electromechanical Systems (MEMS) vertical fringe comb capacitive pressure sensor using Coventorware and Cadence SpectraRF Electronic Design Automation (EDA) tools. The pressure sensor is designed to [...]

A Realistic Dream – a Top-Down Feasibility Study for MEMS Planetary Exploration

Newman R.M., Gaura E.I., Tabor J., Mount S., Coventry University, UK

A feasibility study of a 'dream application', detailing the technological requirements, and using them to produce the design of a sensor node in a top-down manner, in order to establish the feasibility of the scenario [...]

Thermo-Mechanical Characterization and Integrity Checking of Packages and Movable-Structures

Szabo P., Perlaky G., Bognar Gy., Horvath Gy., Ress S., Poppe A., Rencz M., Courtois B., Budapest University of Technology and Economics, HU

The paper will present a variety of possibilities for the thermal characterization of different movable MEMS devices and packaging. It will discuss the major difficulties in these methodologies and the ways to overcome them. Comparison [...]

MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle

Liao H-H, Yang Y-J, National Taiwan University, TW

Recently, the rapid growth of micro- and nano-electromechanical systems (MEMS/NEMS) boosts the demands of advanced diagnostic tools and characterization techniques. One of the most critical demands is the high-resolution tools for measuring MEMS/NEMS dynamic behaviors, [...]

Pressure Sensor Elements Integrated with CMOS

Kiihamäki J., Vehmas T., Suni T., Häärä A., Ylimaula M., Ruohio J., VTT Information Technology, FI

We report the measurement and fabrication results of monolithically integrated capacitive pressure sensor elements. The device fabrication process is based on novel plug-up process, which enables monolithical integration of sensors and CMOS in a modular [...]

Design, Modelling and Simulation of a PZN-PT Actuated Micropump

Malleo D., Haas C., Kraft M., University of Southampton, Microelectronics Group, UK

We present an optimization methodology for the design of a self-priming piezoelectrically actuated pump made of a borosilicate glass bonded to silicon. New findings in the design optimization of the piezo-actuated membrane are presented: it [...]

Modular Design Approaches for MicroFluidic Systems

Gilde M.J., van den Vlekkert H., Leeuwis H., Prak A., CapiliX BV, NL

The possibilities promised by microfluidic systems have not only interested scientists, but also industries, especially in the areas of the Life Sciences (food, medical, biotech) and fine chemistry (pharma) [2]. Microfluidics is the MEMS-field in [...]

UV Laser Micro-Materials Processing Of MEMS, Microfluidics, Sensors, LEDs and Other Miniature Devices

Sercel J.P., JP Sercel Associates, Inc., US

An overview of the types of UV laser processing as applied to the fabrication of miniature devices using advanced UV Excimer and UV DPSS lasers, will be presented. This discussion will include examples of high [...]

Realizing Complex Microsystems: A Deterministic Parallel Assembly Approach

Randall J., Hughes G., Geisberger A., Tsui K., Saini R., Ellis M., Skidmore G., Zyvex Corporation, US

The push towards miniaturization has created substantial interest in microelectromechanical systems (MEMS). To date, most of the developments regarding MEMS technology have relied on monolithic fabrication and integration. The monolithic approach has successfully produced various [...]

Sol-Gel Prepared Single Wall Carbon Nanotube SnO2 Thin Film for Micromachined Gas Sensor

Gong J., Chen Q., Univeristy of Central Florida, US

We report here a novel micromachined single wall carbon nanotube (SWNT)/tin dioxide (SnO2) nano film gas sensor. A polymeric sol-gel process in combination with purified SWNT has been successfully developed in fabricating SWNT/SnO2 thin film [...]