US – Page 465 – TechConnect Briefs

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

Spasojevic M., Ljung P., Bächtold M., Coyote Systems, Inc., US

In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented [...]

Automated Mask-Layout and Process Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

This paper presents a method for automated mask-layout and process synthesis for MEMS. The synthesis problem is approached by use of a genetic algorithm. For a given desired device shape, and several fabrication process choices, [...]

Multiscale Modeling of Stress-Mediated Diffusion in Silicon, Ab Initio to Continuum

Windl W., Laudon M., Daw M.S., Carlson N.N., Masquelier M.P., Motorola, Inc., US

The introduction of new ‘back end’ materials, as well as the further scaling of silicon device dimensions, has raised the level of stress in dvice structures. Current engineering simulations of diffusion neglect the direct effect [...]

Ultrasmall Devices: Are We Ready for Quantum Effects?

Ferry D.K., Arizona State University, US

It is clear that continued scaling of semiconductor devices will bring us to a regime with gate lengths of less than 70 nm within another decade. While there are questions to be answered in the [...]

Top Down Design of MEMS

Fedder G.K., Carnegie Mellon University, US

A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS [...]

CAD for Opto-Electronic Microsystems

Kurzweg T.P., Levitan S.P., Marchand P.J., Prough K.R., Chiarulli D.M., University of Pittsburgh, US

The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended [...]

Rectilinear Dynamics of Magnetically Driven Microsystems

Kilani M.I., Chen C-J., Haik Y., Pai V., FAMU-FSU College of Engineering, US

The dynamic behavior of magnetically driven microsystems is investigated in this study. An experimental setup designed to simulate the dynamic response of a micro-roller element moving in rectilinear path under influence of an external magnetic [...]

Wavelet Transform Image Compression Prototype

Watkins L., Perry K.R., Hurley J.S., Olson B., Pain B., Clark Atlanta Univeristy, US

In this study, we seek to develop a low power, area efficient wavelet compression chip capable of reconstructing sharp images at acceptable noise levels. It can be used in conjunction with such devices as the [...]

Finite Element Modeling of a Microhotplate for Microfluidic Applications

Manginell R.P., Rosato D.A., Benson D.A., Frye-Mason G.C., Sandia National Laboratory, US

A hand-held chemical laboratory (mChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively [...]

Development of CAD Model for MEMS Micropumps

Arik M., Zurn S.M., Bar-Cohen A., Nam Y., Markus D., Polla D., Univeristy of Minnesota, US

This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported [...]