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Home2000March

Month: March 2000

TechConnect Proceedings Papers

Reduced-Order Models of Stress-Stiffened MEMS Structures

Varghese M., Rabinovich V.L., Senturia S.D., Massachusetts Institute of Technology, US
We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static [...]

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Bernstein D., Guidotti P., Pelesko J.A., California Institute of Technology, US
We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]

Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

Taschini S., Baltes H., Korvink J.G., ETH-Hoenggerberg, CH
We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based [...]

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Long D.S., Shannon M.A., Aluru N.R., University of Illinois at Urbana-Champaign, US
In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The [...]

A Quadratic Method for Nonlinear Model Order Reduction

Chen Y., White J.K., Massachusetts Institute of Technology, US
In order to simulate and optimize effciently systems which include micromachined devices, designers need dynamically accurate macromodels for the those devices. Although it is possible to develop such macromodels by hand, it would be vastly [...]

Robust Algorithms for Boundary-Element Integrals on Curved Surfaces

Wang X., Newman J.N., White J.K., Massachusetts Institute of Technology, US
This paper presents a new approach to computing 1/r singularities on curved panels. By using carefully chosen mapping techniques, a curved panel with curved edges is mapped to a at panel with straight edges. Analytical [...]

3D Simulations of Ultra-Small MOSFETs: The Role of the Short Range Coulomb Interactions and Discrete Impurities on Device Terminal Characteristics

Gross W.J., Vasileska D., Ferry D.K., Intel Corporation, US
We have developed a three-dimensional particle based simulator with a coupled molecular dynamics routine that avoids the "double-counting" of the long-range portion of the Coulomb force. As opposed to drift-diffusion based simulators, the Monte Carlo [...]

The Atomic Limit of Finite Elements in the Simulation of Micro-Resonators

Rudd R.E., University of Oxford, UK
We describe developments in the coupling of length scales methodology which allows the simulation of the dynamic and temperature dependent behavior of sub-micron Micro-Electro-Mechanical Systems (MEMS). This novel technique accurately models the behavior of the [...]

Long-Range Coulomb Interactions in Small Silicon Devices: Transconductance and Mobility Degradation

Fischetti M.V., Laux S.E., IBM Research Division, US
In small silicon devices,conduction electrons in the channel are subject to long-range Coulomb interactions with electrons in the heavily-doped drain,source,and gate regions.We show that for devices with channel lengths shorter than about 40 nm and [...]

Hybrid CA/Monte Carlo Modeling of Charge Transport in Semiconductors

Saraniti M., Goodnick S.M., Wigger S.J., Arizona State University, US
We report on the modeling of ultra-small MOS devices using a newly developed full band device simulator. The simulation tool is based on a novel approach, featuring a hybrid Monte-Carlo/Cellular Automata simulation engine self-consistently coupled [...]

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