A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

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In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 481 - 484
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0