Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

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We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based algorithms to solve these non-linear problems, as well as in the analysis of their stability. Our for-mulation of the Jacobian matrix relies on the discretization of the electrostatic sub-model by means of the collocation boundary-element method. It is independent of the discreti-zation method (either boundary or finite elements) and of possible non-linearities in the mechanical sub-model.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 485 - 488
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0