MEMS & NEMS Devices, Modeling & Applications – Page 29

Experimental results for a parametrically excited micro-ring resonator

Harish K.M., Gallacher B.J., Burdess J.S., Neasham J.A., University of Newcastle upon Tyne, UK

This paper reports experimental results for a parametrically excited micro-ring resonator. Actuation and sensing are performed electrostatically thus making the scheme suitable for many vibratory sensors. The equation of motion for the electrostatically actuated MEMS [...]

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

Marzencki M., Basrour S., Belgacem B., Muralt P., Colin M., Tima Laboratory, FR

This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless [...]

Piezoresistive effect in DLC Films and Silicon

Tibrewala A., Phataralaoha A., Peiner E., Bandorf R., Büttgenbach S., TU Braunschweig, DE

In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon [...]

Characterization of An Integrated 3-Axis CMOS-MEMS Accelerometer

Qu H., Fang D., Xie H., Oakland University, US

This paper reports an integrated 3-axis CMOS-MEMS accelerometer with single proof mass. Sensor design, fabrication process are introduced and detailed characterization of this small-sized accelerometer is addressed. Compared to the previously reported 3-axis accelerometers, most [...]

Fabrication of a Real-Time Reactive Ion Etching Resonant Sensor Using a Low Temperature Sacrificial Polymer

Morris B.G., Joseph P.J., May G.S, Georgia Institute of Technology, US

This paper presents a sacrificial layer process using a low temperature polymer as a sacrificial material for fabricating a surface micromachined in-situ reactive ion etching (RIE) resonant sensor. The sensor monitors film thickness and etch [...]

MEMS Sensors for Harsh Environment Applications

Nieva P.M., University of Waterloo, CA

Micro Electro Mechanical Systems (MEMS) for harsh environment applications are becoming increasingly important. They are recognized as essential for reducing weight and volume in strategic market sectors such as automotive, aerospace, turbomachinery, oil well/logging equipment, [...]

Nano-structure or nano-system: opportunities and pitfalls

French P., Delft University of Technology, NL

Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. [...]

MEMS/NEMS

Application of a Design Methodology Using a 2D Micro Scanner

Anac O., Basdogan I., Koc university, TR

Micro Electro Mechanical Systems (MEMS) are the new and emerging technology of the future and have many applications on different disciplines like biomedical, imaging technology, biology etc. Characterization of motion and vibrations of such systems [...]

Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements

You J., Packirisamy M., Stiharu I., Concordia University, CA

In general, this paper presents the deduced analytical model and numerical simulation of electrostatically actuated torsional micromirrors with two symmetrical side springs of multiple rotational serpentine elements. Modelling of these kinds of micromirrors is carried [...]