In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon in a MEMS test structure and shows a high gauge factor value which will make DLC films popular in MEMS. p-diffused strain gauges are presented for comparision. Both the materials shows a promise as force sensors which can be used in 3D coordinate measuring machine.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 17 - 20
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications