Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

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This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless sensor networks, where increasing the autonomy of the node is a crucial issue. In our case, the transduction is performed using the piezoelectric effect and the devices are entirely made using microfabrication techniques. This is a continuation of work already presented that proposes improved devices and use of new materials

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 21 - 24
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 1-4200-6184-4