Chemical, Physical & Bio-Sensors – Page 34

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]

Modeling a High Power Density MEMS Magnetic Induction Machine

Köser H., Lang J.H., Massachusetts Institute of Technology, US

Most micro-scale electric and magnetic machines studied in the last decade lack the power density to support many practical applications. The magnetic induction machine reported here attempts to transcend this practicality barrier by offering power [...]

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE

This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]

Performance Limits of Micromachined Tunable-Cavity Filter

Moon J-S., Shkel A., University of California Irvine, US

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Turowski M., Chan E., Dionne P., CFD Research Corporation, US

For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Davis W.O., Pisano A.P., University of California-Berkeley, US

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion [...]

Applications: MEMS, Sensors

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer

Li G., Li T., Li Z., Li G., Li T., Li Z., Wang C., Hao Y., Li G., Li T., Li Z., Wu G., Peking University, CN

A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations [...]

On Design of a Backplate Used in a Hearing Aid

Pedersen N.L., Technical University of Denmark, DK

In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress [...]