Papers – Page 1005 – TechConnect Briefs

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]

Modeling a High Power Density MEMS Magnetic Induction Machine

Köser H., Lang J.H., Massachusetts Institute of Technology, US

Most micro-scale electric and magnetic machines studied in the last decade lack the power density to support many practical applications. The magnetic induction machine reported here attempts to transcend this practicality barrier by offering power [...]

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE

This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]

Performance Limits of Micromachined Tunable-Cavity Filter

Moon J-S., Shkel A., University of California Irvine, US

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Turowski M., Chan E., Dionne P., CFD Research Corporation, US

For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping

Archives: Papers

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Multiple Solutions in Electrostatic MEMS

Modeling a High Power Density MEMS Magnetic Induction Machine

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Performance Limits of Micromachined Tunable-Cavity Filter

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Atomistic Simulation of Electro-Osmosis in a Nanometer-Scale Channel

Simulation of Flow in Structurally Programmable Microfluidic Channels

Optimization of a MEMS Based Micro Capillary Pumped Loop for Chip-Level Temperature Control