Metal-Oxide-Semiconductor Structures with Two and Three-Region Gate Dielectric Containing Silicon Nanocrystals: Structural, Infrared and Electrical Properties

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MOS structures with two and three-region gate dielectrics containing Si nanocrystals are prepared and characterized by TEM, IR spectroscopy and electrical measurements. c Si/SiO2 containing Si NCs/SiO2/Al structures were obtained by high temperature annealing of [...]

Investigation of Metal Nano Layer Formation by the Tunneling Current through the Thin Oxide Film in the Electrolyte–Oxide–Silicon System

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In the researches on Electrolyte–Oxide–Silicon (EOS) system, tunneling current through the gate insulator has been considered as an undesirable factor causing reliability issues such as gate insulator degradation and interface state generation. In this work, [...]