MEMS – Page 27 – TechConnect Briefs

Stress Measurement in MEMS Devices

Starman Jr. L., Busbee J., Reber J., Lott J., Cowan W., Vandelli N., Wright-Patterson AFB, US

Due to the unique structure and small scale of Micro-Electro-Mechanical Systems (MEMS), residual stresses during the deposition processes can have a profound affect on the functionality of the MEMS structures. Typically, material properties of thin [...]

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

Yao Y., Castracane J., Xu B., Olson S., Eisden J.V., University at Albany-SUNY, US

This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package [...]

MEMS Simulation in Heavily Doped Silicon Devices

Matsuda K., Kanda Y., Naruto University of Education, US

Simulation of the semiconductor transport under heavily doped and stressed conditions is presented. The degenerate statistics are introduced by taking into account the density-of-state functions for the band tail and the impurity band. The momentum-dependent [...]

Development of Patterned SMA Strips as Self-Heating Resistors

Chen J., Cheng X.L., Cai B.C., Xu D., Wang L., Cheng X.L., Shanghai Jiao Tong University, SG

A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US

We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Performance Limits of Micromachined Tunable-Cavity Filter

Moon J-S., Shkel A., University of California Irvine, US

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Turowski M., Chan E., Dionne P., CFD Research Corporation, US

For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Davis W.O., Pisano A.P., University of California-Berkeley, US

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion [...]

Mixed-Dimensionality, Multi-Physics Simulation Tools for Design Analysis of Microfluidic Devices and Integrated Systems

Przekwas A.J., Makhijani V.B., CFD Research Corporation, US

Computational design of microfluidic devices and integrated microsystems involves several strongly coupled physical disciplines, including fluid mechanics, heat transfer, stress/deformation dynam-ics, electrokinetics, biochemistry and others. CFDRC is dev