Quantitative Synchrotron Grazing Incidence X-ray Scattering and Reflectivity Analysis of Nano-structures and Patterns Supported with Substrates

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Single-layer, multi-layer, and patterned nanostructures were fabricated with aids of substrates from various material systems (polymers, diblock copolymers, polymer blends, alumina precursors, silane precursor, etc.) using wet spin-coating and subsequent dry and thermal process, chemical [...]