Quantitative Synchrotron Grazing Incidence X-ray Scattering and Reflectivity Analysis of Nano-structures and Patterns Supported with Substrates
Chang T., Choi S.C., Heo K., Hwang Y., Jin K.S., Jin S., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Lee B., Oh W., Park I., Park Y.H., Ree M., Yoon J., Pohang University of Science & Technology, KR
Single-layer, multi-layer, and patterned nanostructures were fabricated with aids of substrates from various material systems (polymers, diblock copolymers, polymer blends, alumina precursors, silane precursor, etc.) using wet spin-coating and subsequent dry and thermal process, chemical [...]