DE – Page 37 – TechConnect Briefs

Simulation of Orientation-Dependent Etching of Silicon Using a New Step Flow Model of 3D Structuring

Horn A., Schröder H., Obermeier E., Wachutka G., Münich University of Technology, DE

We present a new model of three-dimensional orientation-dependent etching of Si{100}. Recent experimental results suggest to conceive etching as a “peeling” process of terraced planes, leading to the concept of a “step flow model of [...]

Physically Rigorous Modeling of Sensing Techniques Exploiting the Thermo-Optical and Electro-Optical Effect

Thalhammer R., Hille F., Scheubert P., Wachutka G., Münich University of Technology, DE

The complex refractive index in semiconductors depends on several electrical, thermal, and mechanical state variables, e. g. carrier concentrations, lattice temperature, or mechanical stress. Making use of these dependencies, various internal laser probing techniques and [...]

System-Level Optical Models of 3-D Laser Projection Systems Using Micromirror Arrays

Albrecht J., Seidel R., Melzer L., Müller D., Chemnitz University of Technology, DE

In this paper the development of system-level optical models that can be used e.g. for simulating entire laser projection systems is presented. After a short motivation ray optics as the simplest theory of optics is [...]

Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process

Guth H., Hellmann A., Sieber I., Eggert H., Mohr J., Nakajima H., Tanimot K., Usami T., Forschungszentrum Karlsruhe GmbH, DE

The aim of the presented work is to simulate and validate an ultra miniaturized optical distance sensor, which works by means of triangulation. The sensor is dedicated for a detection range of 1 to 6mm [...]

Nanosecond Range Heating and Temperature Measurement on Thin Layers Experiment and Simulation

Moritz W., Roth U., Heyde M., Rademann K., Reichling M., Hartmann J., Humboldt Universitat zu Berlin, DE

A chemical semiconductor sensor for oxygen gas was activated by thermal treatment. The thin Pt layer of the n-Si/SiO2/Si3N4/LaF3/Pt field effect structure was used as the gate electrode for sensitivity measurements, heating resistance and temperature [...]

Modeling Approach for CVD-Diamond Based Mechanical Structures

Schmid P., Adamschik M., Ertl S., Gluche P., Kohn E., University of Ulm, DE

In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated [...]

Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors

Romes W., Muchow J., Finkbeiner S., Franz J., Schatz O., Trah H-P., Robert Bosch GmbH, DE

The signal formation in piezoresistive silicon pressure sensors has been studied for many years and is very well understood meanwhile. Nevertheless there are higher order effects of nonideal behaviour such as nonlinearities and hys-teresis effects [...]

Fluctuating Amplitudes of Micro-Cantilever Vibration Modes

Greiner A., Fischer M., Korvink J.G., Albert Ludwigs Universitat Frieburg, DE

We investigate fluctuations in the mode amplitudes of vibrating micro mechined cantilevers in a gaseous environment. The movement of a micro-cantilever in thermal equilibrium consists of an superposition of its vibration modes. Each vibrating mode [...]

Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics

Thomas J., Kühnhold R., Schnupp R., Temmel G., Ryssel H., Fraunhofer-Institut fur Integrierte Schaltungen, DE

A novel MEMS vibration sensor for high acceleration am-plitudes was developed in silicon technology for tool state monitoring. According to the application-specific require-ments, the piezoresistive detection of vibration with polysilicon piezoresistors deposited on a thin [...]

Simulation of Micro-Channel Heat Sinks for Optoelectronic Microsystems

Kreutz E.W., Pirch N., Ebert T., Wester R., Ollier B., Loosen P., Poprawe R., Rheinisch-Westfälische Technische Hochschule Aachen, DE

Water-cooled heat sinks are investigated both experimentally and theoretically as model systems to simulate the energy and mass transport in devices used for cooling of diode lasers. The design of the micro-channel heat sinks yields [...]