Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector

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In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite droplets. We demonstrated that the SiN layer in-between the heater and the ink has dominant effect in optimizing the thermal efficiency of this structure. Besides, a SiN layer of 0.8 um in thickness is proven for good thermal efficiency as well as good printing quality. By using this simulation tool, the layer thickness effect on bubble nucleation is well illustrated and optimized to achieve heater structure design optimization.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 100 - 103
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 1-4200-6184-4