With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]
In this work, we demonstrate a surface micromachined fabrication approach for integrated addressable metal electrodes within centimeter-long nanofluidic channels using a low-temperature, xenon diflouride dry-release method for novel biosensing applications. The main contribution of this [...]
A major obstacle in the realization of commercially viable single-walled carbon nanotube (SWNT) based devices, hindering the functionality of this uniquely interesting type of material, is their type and site selective integration. In this work, [...]
The fundamental limitations of the nano-scale motors driven by flux of photons are well understood. The amount of torque that can be obtained in any nano-scale structure is very low, presenting a real challenge to [...]
, Epp, L.
, Kaul, A.B.
, Khan, A.R.
, Megerian, K.G.
, Jet Propulsion Laboratory, US
AC and DC Applications of Three-Dimensional Nano-electro-Mechanical-Systems Anupama B. Kaul,1 (*)Abdur R. Khan,1,2 Krikor G. Megerian,1 Leif Bagge,1,3 and Larry Epp,1 1Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109 2Keck School of Medicine, [...]
For the past few decades, the electronics industry has relied on quartz based timing solutions, which involve machining of crystals and then marrying them to analog circuits inside an expensive, ceramic package. Furthermore, this package [...]
Reducing the weight of spacecraft will reduce both fabrication and launch costs. The elimination of wiring and wiring harnesses reduces the total mass of the vehicle. Wireless sensor technology can reduce the weight and therefore [...]
Nanonewton level, multi-axis force sensing is required for many biology, materials science and nanomanufacturing applications. Unfortunately, these requirements are difficult to achieve given the size, sensitivity and fabrication limitations associated with existing small-scale sensing techniques. [...]
, Griessler, C.
, Koeck, A.
, Maier, T.
, Mutinati, G.
, Steinhauer, S.
, AIT Austrian Institute of Technology GmbH, AT
Numerous applications ranging from industrial process control to personal safety systems and environmental monitoring have a strongly increasing demand for highly sensitive gas detecting devices. We present nanosensors based on SnO2-nanowires, which are extremely sensitive [...]
, Dahlem, M.S.
, Holzwarth, C.W.
, Ippen, E.P.
, Kärtner, F.X.
, Khilo, A.
, Smith, H.I.
, Massachusetts Institute of Technology, US
In silicon photonics, light sources are typically located off-chip and connected to the chip with optical fibers. The problem of efficient coupling between the fiber and a submicron waveguide is challenging because the mode areas [...]
This research looks at using a polymer Air-gap structures as a cost efficient method of wafer and chip level packaging MEMS devices for a wide range of applications. The presentation will describe how this style [...]
, Lee, S.
, Lin, C.C.
, Sung, L.
, Yang, F.
, National Tsing Hua Univesity, TW
Fracture-induced structure (FIS)1 is found in the polymeric thin film sandwiched between two relatively rigid flat plates by inserting a razor blade at one edge. FIS is a potential candidate to be a low-cost and [...]
The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.
In this paper we report a novel low plasma power reactive ion etching technique to achieve high rate, high aspect ratio features on silicon. The etching process is achieved using a sequential passivation and etching [...]
Robust fabrication of functional components in microfluidic devices will drive down their cost and improve their performance. We have developed a modular and readily customized approach for routine and volume production of complex microfluidic devices [...]
There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this [...]
Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.
This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. The on-line testing tool presented in this paper is [...]
, Kaur, M.
, Kumar, D.
, Rangra, K.
, Sharma, A.
, Central Electronics Engineering Research Institute (CEERI/ CSIR), IN
A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]
, Napieralski, A.
, Pozniak, T.
, Przygoda, K.
, Sekalski, P.
, Technical University of Lodz, PL
The main part of linear accelerator (linac), used for driving the Free-Electron Laser (FEL) machine, is superconducting (SC) resonant cavity. The SC cavity is very susceptible to small changes in dimension because of a very [...]
This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]
This work presents the development of a novel pressure sensing array which sensing ranges are tunable during operation. The sensing element consists of carbon nanotubes (CNT) dispersed in nematic liquid crystals composites. The sensing ranges [...]
Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS [...]
In recent years the use of micro and nano electromechanical (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. In many applications, high sensitivity biomass sensors are required to sense small biological entities (e.g. [...]
This paper presents the electrical performance comparison of Symmetric Toggle RF MEMS Switch (STS), by incorporating hafnium oxide (HfO2) as a dielectric material instead of silicon dioxide (SiO2). Fig. 1(a) and (b) shows the 3-D [...]
, Chawla, P.
, Chhikara, A.
, Gupta, N.
, Kaur, K.
, Saluja, N.
, Suman, S.K.
, KITM,kurukshetra, IN
In this proposal, the application of MEMS technology with a focus on RF applications in the design of next generation mobile terminal is taken up. RF MEMS switches have displayed excellent RF characteristics, including lower [...]
We present a theoretical study of our proposed gravimeter on a chip. A gravimeter is a device used to measure gravity. In contrast to conventional gravimeters, our gravimeter is expected to be microscale, cheaper, more [...]
Nanowires of K2Mo3O10.4H2O with high yield were synthesized in 15 min using simple chemical method at room temperature from aqueous precursors; (NH4)6Mo7O24.4H2O and KCl mixed in a mass ratio of 3:1. Water solubility rate of [...]
This paper presents, for the first time, a silicon-based wideband RF nano switch with simulation fabrication measurement and analysis. Port-to-port simulation results of the RF nano switch indicate that the designed switch has a potential [...]
Future RF network’s main requirements are compact size; support to heterogeneous network which drive the requirements for multiband support. Self-similar shaped structure has useful applications in cellular telephone and microwave communications etc. Video conferencing, streaming [...]
In this paper, an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of mobile terminal are presented. Such RF MEMS switches have displayed excellent RF characteristics, [...]
We perform the feasibility analysis of sensing weak magnetic fields by using soft ferrite nanoparticles embedded in molecular complexes. The sensing mechanisms are based on the deflection of molecular complexes and induced strain due to [...]
Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible [...]
As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. [...]
To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are [...]
, Fang, Z.
, Han, Y.
, Wang, X.
, Zhao, Z.
, Institute of Electronics,CAS, CN
This paper reports a novel micro wind sensor with comb finger shaped structure based on MEMS technology and capacitive sensing principle, which can measure wind speed and direction simultaneously. The proposed sensor was theoretically analyzed [...]
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications