Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection

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Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible change in drain current confirms the feasibility of TFT-based MCLs for monitoring deflection at the sensitivity of 40 nA/μm.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Pages: 402 - 405
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-7139-3