LETI – TechConnect Briefs

Integration Approaches of Combining Micro and Nano Technologies

Rouzaud A., Robert Ph., Polizzi J.-Ph., Sillon N., LETI, FR

With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]

Numerical Modeling of Ferrofluid Flow Instabilities in a Capillary Tube at the Vicinity of a Magnet

Berthier J., Ricoul F., LETI, FR

The use of ferrofluids is now foreseen to be important for microfluidic systems and biotechnological microsystems as microvalves, micropumps or for the control and synchronization of the flow. The advantage lies in the possibility of [...]

Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation

Scheiblin P., Roger F., Poncet D., Laviron C., Holliger P., Laugier F., Guichard E., Caire J.P., LETI, FR

In this work, we propose calibrated models for predictive simulation of low energy Arsenic, Boron and BF2 ion implantation in the suitable range for sub-100nm CMOS technology. The International Technology Roadmap for Semiconductors (ed. 1999) [...]

Numerical Modeling of Magnetic Field Flow Fractionation in Microchannels: A Two-fold Approach Using Particle Trajectories and Concentration

Berthier J., Pham P., Massé P., LETI, FR

Submicronic paramagnetic particles are currently used for biological applications like medical diagnostic [1]. Recently modeling of displacement of such particles has seen new developments like the calculation of the trajectory of a particle [2], or [...]