Papers:
Integration Approaches of Combining Micro and Nano Technologies
With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]
Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes
In this work, we demonstrate a surface micromachined fabrication approach for integrated addressable metal electrodes within centimeter-long nanofluidic channels using a low-temperature, xenon diflouride dry-release method for novel biosensing applications. The main contribution of this [...]
Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors
A major obstacle in the realization of commercially viable single-walled carbon nanotube (SWNT) based devices, hindering the functionality of this uniquely interesting type of material, is their type and site selective integration. In this work, [...]
Design of a g-force meter on Si wafer, based on motor driven by photons
The fundamental limitations of the nano-scale motors driven by flux of photons are well understood. The amount of torque that can be obtained in any nano-scale structure is very low, presenting a real challenge to [...]
AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems
AC and DC Applications of Three-Dimensional Nano-electro-Mechanical-Systems Anupama B. Kaul,1 (*)Abdur R. Khan,1,2 Krikor G. Megerian,1 Leif Bagge,1,3 and Larry Epp,1 1Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109 2Keck School of Medicine, [...]
Programmable MEMS-Based Silicon Timing Solutions Change the Game
For the past few decades, the electronics industry has relied on quartz based timing solutions, which involve machining of crystals and then marrying them to analog circuits inside an expensive, ceramic package. Furthermore, this package [...]
Space Applications for Wireless Sensors
Reducing the weight of spacecraft will reduce both fabrication and launch costs. The elimination of wiring and wiring harnesses reduces the total mass of the vehicle. Wireless sensor technology can reduce the weight and therefore [...]
Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors
Nanonewton level, multi-axis force sensing is required for many biology, materials science and nanomanufacturing applications. Unfortunately, these requirements are difficult to achieve given the size, sensitivity and fabrication limitations associated with existing small-scale sensing techniques. [...]
Tin oxide nanowire sensors for highly sensitive detection of toxic gases
Koeck A., Brunet E., Griessler C., Maier T., Mutinati G., Steinhauer S., AIT Austrian Institute of Technology GmbH, AT
Numerous applications ranging from industrial process control to personal safety systems and environmental monitoring have a strongly increasing demand for highly sensitive gas detecting devices. We present nanosensors based on SnO2-nanowires, which are extremely sensitive [...]
Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers
Araghchini M., Khilo A., Holzwarth C.W., Dahlem M.S., Smith H.I., Ippen E.P., Kärtner F.X., Massachusetts Institute of Technology, US
In silicon photonics, light sources are typically located off-chip and connected to the chip with optical fibers. The problem of efficient coupling between the fiber and a submicron waveguide is challenging because the mode areas [...]
Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures
This research looks at using a polymer Air-gap structures as a cost efficient method of wafer and chip level packaging MEMS devices for a wide range of applications. The presentation will describe how this style [...]
Comparaison between PDMS and PMMA for MEMS applications
The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.
High-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system
In this paper we report a novel low plasma power reactive ion etching technique to achieve high rate, high aspect ratio features on silicon. The etching process is achieved using a sequential passivation and etching [...]
Modularity in the Design and Volume Production of Microfluidic Devices
Robust fabrication of functional components in microfluidic devices will drive down their cost and improve their performance. We have developed a modular and readily customized approach for routine and volume production of complex microfluidic devices [...]
An Improved Micro Injection Molding Technique for Grating Devices
There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this [...]
Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties
Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.
Multi-purpose tool for checking the microfabrication products
This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. The on-line testing tool presented in this paper is [...]
Fabrication and analysis of MEMS test structures for residual stress measurement
Sharma A., Kaur M., Bansal D., Kumar D., Rangra K., Central Electronics Engineering Research Institute (CEERI/ CSIR), IN
A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]
SC Cavities Fast Tuning System Based on Piezoelectric Actuators
The main part of linear accelerator (linac), used for driving the Free-Electron Laser (FEL) machine, is superconducting (SC) resonant cavity. The SC cavity is very susceptible to small changes in dimension because of a very [...]
Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators
This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]
A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency
This work presents the development of a novel pressure sensing array which sensing ranges are tunable during operation. The sensing element consists of carbon nanotubes (CNT) dispersed in nematic liquid crystals composites. The sensing ranges [...]
Control of MEMS-Technology Axial Topology MicroServos
Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS [...]
High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications
In recent years the use of micro and nano electromechanical (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. In many applications, high sensitivity biomass sensors are required to sense small biological entities (e.g. [...]
Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers
This paper presents the electrical performance comparison of Symmetric Toggle RF MEMS Switch (STS), by incorporating hafnium oxide (HfO2) as a dielectric material instead of silicon dioxide (SiO2). Fig. 1(a) and (b) shows the 3-D [...]
Reconfigurable RF Front End Section of Mobile
Chawla K., Chawla P., Saluja N., Chawla K., Chawla P., Gupta N., Chhikara A., Kaur K., Suman S.K., KITM,kurukshetra, IN
In this proposal, the application of MEMS technology with a focus on RF applications in the design of next generation mobile terminal is taken up. RF MEMS switches have displayed excellent RF characteristics, including lower [...]
Gravimeter on a Chip: A Theoretical Study
We present a theoretical study of our proposed gravimeter on a chip. A gravimeter is a device used to measure gravity. In contrast to conventional gravimeters, our gravimeter is expected to be microscale, cheaper, more [...]
A simple and low cost method for fabrication of nanochannels using water soluble nanowires
Nanowires of K2Mo3O10.4H2O with high yield were synthesized in 15 min using simple chemical method at room temperature from aqueous precursors; (NH4)6Mo7O24.4H2O and KCl mixed in a mass ratio of 3:1. Water solubility rate of [...]
A Novel Silicon-based Wideband Nano Switch for RF Applications
This paper presents, for the first time, a silicon-based wideband RF nano switch with simulation fabrication measurement and analysis. Port-to-port simulation results of the RF nano switch indicate that the designed switch has a potential [...]
Meander based RF MEMS capacitive switch for Mobile Front End Terminal Antenna support
Future RF network’s main requirements are compact size; support to heterogeneous network which drive the requirements for multiband support. Self-similar shaped structure has useful applications in cellular telephone and microwave communications etc. Video conferencing, streaming [...]
Design and Analysis of FBAR switches for RF Front-End Mobile Terminal
In this paper, an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of mobile terminal are presented. Such RF MEMS switches have displayed excellent RF characteristics, [...]
Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS
We perform the feasibility analysis of sensing weak magnetic fields by using soft ferrite nanoparticles embedded in molecular complexes. The sensing mechanisms are based on the deflection of molecular complexes and induced strain due to [...]
Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection
Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible [...]
Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology
As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. [...]
Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study
To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are [...]
Comb Finger Capacitive Micro Wind Senor
This paper reports a novel micro wind sensor with comb finger shaped structure based on MEMS technology and capacitive sensing principle, which can measure wind speed and direction simultaneously. The proposed sensor was theoretically analyzed [...]
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-7139-3