Driven by fast growth of wireless communications, film bulk acoustic resonators (FBAR) have been extensively studied as RF filters. Recently, an integrated RF solution, which could include multiple mobile bands, WLAN, Bluetooth, GPS, and etc., [...]
We recently started a program at Argonne to exploit patterned, polarizable ferroelectric surfaces, such as lead zirconium titanate (PZT), as a means to create field-responsive inorganic-biomolecule interfaces to study and manipulate biomatter on surfaces. In [...]
We have developed and implemented a method which when given a three-dimensional object can infer from the object's topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this [...]
We report on the initial results of a study involving a novel materials scheme – a solid electrolyte-electrodeposit system based on germanium selenide glass doped with silver – which holds great promise as a means [...]
A recently developed RF-MEMS technology based on high resistivity Silicon substrate and suspended gold membrane is proposed for the design of a switching dual frequency LC-tank, for the implementation of a hybrid MEMS-CMOS dual-band voltage [...]
Paper describes the fabrication and testing of a micromachined electrical field-flow fractionation system, performing separations of various types of nanoparticles.
Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper [...]
As the U.S. Army transforms into a lighter, more lethal force, the technologies that support both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such [...]
This paper is about the impact of scaling on the system performance of mechanical inertia sensors and first activities towards nano mechanical sensors. Permanent cost pressure will result in continuous efforts to integrate more functions [...]
This paper reviews the field of intelligent (smart) sensor technology and describes some of the trends that have emerged over the last two decades. The functionality of intelligent sensors is discussed, together with an assessment [...]
Nanometric control of optical quality is relevant in many different fields, ranging from Ophthalmology to Lithography, where ordinary setups suffer from optical aberrations. Most common aberrations feature amplitudes in the nanometer range and are often [...]
This paper describes the potential for optimising a resonant gas sensor by using nano-textured surfaces. Initial modelling proved that a device with a nano-textured active layer could have its surface area increased by an order [...]
We present numerical simulations and experiments on dielectrophoretic (DEP) separation and trapping performed in a titanium-based microchannel linear electrode array. The device is designed to allow for effects driven by inhomogeneities in electric-field magnitude driven [...]
The performance of a membrane microreactor was tested and compared with that of microreactor, packed bed reactor (PBR) and packed bed membrane reactor (PBMR) for the Knoevenagel condensation reaction of benzaldehyde and ethyl cyanoacetate to [...]
The advance of MEMS based sensors and microfabrication techniques has facilitated innovative technologies such as so-called ‘atom chips’, where a cloud of ultra cold atoms in a Bose Einstein Condensate (BEC) is controlled and manipulated [...]
Electro-thermal polysilicon actuators are widely employed in optical MEMS applications. These actuators are typically designed for maximum deflection (unloaded) or force (loaded) output characteristics. The optimal design methodology of the actuator has been investigated previously [...]
, Tsai S.C.
, Song Y.L.
, Chou Y.F.
, Qiu G.
, Degiovanni E.
, Wang N.
, Cheng J.S.
, Tsai C.S.
, Tsai S.C.
, University of California Irvine, US
This paper reports on modeling/simulation and design, MEMS-based fabrication of MHz ultrasonic nozzles, and their applications to micro- and nano-technologies. The ultrasonic nozzle is made of a piezoelectric drive section and a silicon-resonator consisting of [...]
This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The proposed actuation mechanism is using the attraction force between the charged bodies to bend the [...]
In this paper, we fabricate and characterize the metal-oxide-semiconductor (MOS) transistor tip integrated micro cantilever, which is proposed for a future high-density data storage system. The integrated MOS transistor tip as the sensing part has [...]
A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. Unlike in microelectronics the process configuration for MEMS [...]
In this paper, we demonstrate a package method for a package component of LED (Light Emitting Diode) using state of the art MEMS technologies and careful materials selection such as using a silicon substrate to [...]
Pitch-tunable gratings can find many applications and have been widely investigated. However, they are limited to out-of plane type, which increase the cost for alignment and assembly. Instead, an in-plane type can built more micro [...]
To realize high sensitive bolometer, new material with higher TCR value is needed including the low thermal mass : small pixel size and very thin thermally isolated membrane. Mixed-valent manganese, perovskite La0.67(Sr, Ca)0.33MnO3 (LSCMO) films [...]
When MEMS Structure, like RF switch, manufactured in high temperature is cooled down to the room temperature, the difference of the thermal expansion coefficients of structural materials, which are aluminum layer for electrical function and [...]
Two new types of electrostatic grating light modulators (GLMs) are proposed, designed, and analyzed here for improvement on optical wavefront distortion. The proposed GLMs consist different microbeam structures with spring-like legs to improve the flatness [...]
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications