Kraft M., Dong Y.
Southampton University, UK
Keywords: capcitive, closed loop, MEMS Interface, sensor, sigma-delta modulator
Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 459 - 462
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-2-2